Analysis of Realistic Large MEMS Devices

A high-speed high-accuracy 3D field solver for the solution of coupled multi-physics encountered in MEMS is presented. The software AutoMEMS enables automatic model generation from layout, automatic meshing, adaptive mesh refinement of large complex geometries encountered with realistic MEMS devices. Arbitrary types of materials, general geometries, and all types of boundary conditions are supported to solve coupled electro-mechanical 3D fields.