Modeling and experimental analyses for nano-positioning compliant mechanisms

There are non-linear errors, hysteresis errors and so on in the actuators made of piezoelectric ceramics. And these errors are especially conspicuous in the case of large range motion. In this paper, we gain nano-positioning accuracy of the conventional mechanical device by compliant mechanism for motion reduction. Firstly, the analytical model of the compliant mechanism for motion reduction has been founded using the Castigliano's second theorem. Secondly, the theoretical analysis by the finite element method is carried out in this paper. Finally, compliant mechanism for motion reduction of the same size and the same material is made to be calibrated by the measure instrument. As a result of our experiments, we conclude that the compliant mechanism for motion reduction can realize several tens microns range of motion and nano-positioning resolution. Furthermore, both non-linear errors and hysteresis errors are tiny.