The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied.