Broadband Bragg filter in microfabricated AlGaAs waveguides

We report on the fabrication and characterization of broadband Bragg filters in microfabricated AlGaAs waveguides. Electron‐beam lithography and chemically assisted ion‐beam etching were used to fabricate first‐order gratings with 250 nm period. Bragg filters with rejection bandwidth ∼15 nm and centered at ∼1.6 μm are demonstrated.