Method and computer program product for OCT measurement beam adjustment

A method for determining deviations between the coordinate system (15) of a two-axis (C, D) tiltable measuring scanner (13) which deflects a measuring beam (12) two-dimensionally, and the coordinate system (10) of a two axes (A, B ) tiltable processing scanner (7), which deflects both the measuring beam deflected by the measuring scanner (12) and a processing beam (3) two-dimensionally on a workpiece (2) comprises: Determining the xy-focal position deviation of the machining beam relative to the aperture diaphragm center (20) of a pinhole detector (21) arranged on the workpiece support plane (8) by scanning the pinhole diaphragm with the machining beam deflected by the machining scanner in an xy-grid and by evaluating the in each of the screen dots (FIG. 23) detected laser power, and fixing the processing scanner in the basis of the determined xy focus position deviation corrected scan position in which the focus position of the processing beam is in a predetermined position; in the case of a processing scanner fixed in the corrected scanning position, recording of spatially resolving height information of the pinhole diaphragm by means of a sensor (17) by scanning the pinhole diaphragm with the measuring beam deflected by the measuring scanner; and - Determining a translational deviation (.DELTA.x, .DELTA.y) between the coordinate systems based on the present in the sensor image of the sensor deviation between the focal position of the processing beam corresponding prior art image position and the detected from the height information pinhole center (20 ').