Deformation analysis of optical flat surface with finite element method

Proposing a new method for testing the ultra-precision aerostatic spindle motion accuracy based on analyzing the online real-time dynamic interference image. Optical flat crystal as the testing standard will be installed at the end of the ultra precision aerostatic spindle and will motion along with the spindle. On the other end of the spindle, the tool will be installed for online processing. The image data of optical flat crystal collected by the high-precision dynamic interferometer will be processed for analyzing the spindle error. For collecting higher accuracy image data, the installation way of optical flat crystal is one of the key technologies. Base on this, the effects of the clamping means on the surface accuracy of optical flat crystal is studied. At first, the finite element model of the optical flat crystal`s clamping structure were established. Secondly, the influence of the material of the supporting annulus, preload lateral clamping and spindle speed on the surface accuracy of optical flat crystal had been analyzed. At last, the improved and optimized structure of the optical flat crystal has been presented. As the analysis results shown, the RMS value of reference surface is 9.47nm and the deformation values of the central region is 0.17nm which satisfies the requirement of surface accuracy and installation of optical flat crystal. It has a very important theoretical and practical significance to establish spindle online testing system and research rotary error generating mechanism of ultra-precision spindle to improve surface accuracy of ultra-precision machining.