Semiconductor Sensor (1)—Sensors for Power Trains

Keiji Hanzawa,Kenji Nakabayashi,Akio Yasukawa,Shinya Igarashi,Hiroaki Hoshika

Semiconductor Sensor (1)—Sensors for Power Trains

2014

Keiji Hanzawa
Kenji Nakabayashi
Akio Yasukawa
Shinya Igarashi
Hiroaki Hoshika

This chapter explains microelectromechanical system (MEMS) airflow sensor and semiconductor pressure sensor. Sensing principles, manufacturing processes, possible problems for automotive applications, and their preventive actions are described. Keywords: MEMS airflow sensor; semiconductor pressure sensor; sensing principle; manufacturing process; diaphragm

Keywords:

Electro-optical sensor
Diaphragm (structural system)
Pressure sensor
Microelectromechanical systems
Airflow
Train
Semiconductor
Control engineering
Electronic engineering
Engineering
manufacturing process
Electrical engineering
Automotive industry

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