Ultra-compact and highly sensitive pressure sensor based on nano-gauge detection and cointegrated with inertial sensors

This paper reports for the first time the experimental pressure response of an ultra-compact and highly linear absolute pressure sensor based on suspended piezoresistive nano-gauges with mechanical amplification and embedded low voltage self-test. Nano-gauges being suspended and structurally protected from the external environment, it can be used in high temperature and harsh environments. Unidirectional and amplified stress on the nano-gauges allows drastic miniaturization (0.12mm2 footprint for a 1 bar structure). In addition, the M&NEMS technology used for the manufacturing enables its direct cointegration with inertial sensors.