The electronic device, a thin film transistor array substrate and its manufacturing method

Electronic device and manufacturing method thereof, manufacturing method of a thin film transistor, and an array substrate and a manufacturing method thereof. The manufacturing method of an electronic device, comprising: a base substrate formed on a metal structure; oxygen-free insulating layer is formed on the metal structure and the base substrate; and forming an insulating layer on an oxygen-free protective insulating layer. The manufacturing method of an electronic device is formed by an insulating layer not containing oxygen anaerobic element on the metal structure, the metal structure to protect against oxidation of the metal structure.