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Thin film formation of ferroelectric undoped HfO2 on Si(100) by RF magnetron sputtering
Thin film formation of ferroelectric undoped HfO2 on Si(100) by RF magnetron sputtering
2018
Min Gee Kim
Ohmi Shun-ichiro
Keywords:
Thin film
Sputter deposition
Ferroelectricity
Optoelectronics
Materials science
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