Parallel plate slot array antenna fabrication by a nano-imprinting technology in the millimeter-wave band

This paper presents a 60GHz radial line slot antenna (RLSA)[1] by using nano-imprinting technology. Conventionally, slot array antennas on substrates are fabricated by etching. However, the etched slots have fabrication error around 25μm in the slot dimensions. Such error causes the operating frequency shift of about 500MHz. On the other hand, the nano-imprinting technology gives more accurate fabrication with nanometer order and is used for making optical disks [2-4] at low cost. This technology is expected to improve the deviation of the operating frequency to less than 25MHz.