Fully CMOS compatible low-power microheater

An original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20,000 degrees C/W) and very low power consumption (20 mW for heating at 400 degrees C). Moreover, the use of CMOS-IC compatible TMAH-based bulk-micromachining techniques will allow an easy and low cost gas sensor integration.