PHOTOTHERMAL RADIOMETRY OF INFRARED TRANSLUCENT MATERIALS

SiC layers on silicon have been investigated by photothermal radiometry to study the influence of infrared emission spectra on the photothermal signal behavior. This was done by placing different band pass filters in front of the infrared detector. Because of the small amplitude of the obtained infrared signal, background contributions must be eliminated. A technique to correct the data with respect to background is presented and experimentally tested.