Light-emitting device with monolithic integration on bulk silicon in standard complementary metal oxide semiconductor technology

A silicon light-emitting device is designed and realized in standard 3-μm complemen- tary metal oxide semiconductor (CMOS) integrated circuitry. Accordingly, it can be integrated with its signal processing CMOS and BiCMOS circuits on the same chip, thus enabling the fabrication of much needed all-silicon monolithic optoelectronic systems operated by a single supply. The device emitted light in a broad, bell-shaped spectrum from 500 to 850 nm with characteristic peaks at 650 and 750 nm. Initial investigations indicate that the quantum efficiency is of the order of 10 −8 and the electric-to-optical power conversion efficiency is of the order of 10 −9 . This silicon light-emitting device has obvious applications in the electro-optical inter- connect. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) (DOI: 10.1117/1.JNP.7