A Compact Silicon Photonics Circuit to ExtractMultiple Parameters for Process ControlMonitoring

We present a compact interferometer circuit to extract multiple model parameters of on-chip waveguides and directional couplers from optical measurements. The compact design greatly improves the accuracy of extraction with fewer measurements, making it useful for process monitoring and detailed wafer-level variability analysis. We discuss the design requirements and illustrate the extraction using the Restart-CMA-ES global optimization algorithm.