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(Invited) Developments in Vertical GaN p-n Junction Structures Via p-Type Ion Implantation
(Invited) Developments in Vertical GaN p-n Junction Structures Via p-Type Ion Implantation
2021
Mark S. Goorsky
Yekan Steven Wang
Michael E. Liao
Kenny Huynh
Travis J. Anderson
Karl D. Hobart
James Tweedie
Andrew A. Allerman
Keywords:
Crystallography
Ion implantation
p–n junction
Materials science
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