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Numerical Simulation of Aluminum Nitride Films Synthesized by Nitrogen Ion Beam Assisted Aluminum Deposition
Numerical Simulation of Aluminum Nitride Films Synthesized by Nitrogen Ion Beam Assisted Aluminum Deposition
1997
Qiang Pang
Yasuo Takahashi
Katsunori Inoue
Bunkei Kyo
Keywords:
Ion beam
Nitrogen
Computer simulation
Nitride
Aluminium
Analytical chemistry
Chemistry
Inorganic chemistry
aluminum deposition
Correction
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