Apparatus for coating both sides of substrates with a hydrophobic layer

2004 
An apparatus for coating both sides of substrates (10) with a hydrophobic layer in a vacuum coating system (20) comprises a substrate holder (26). On one side of the substrate holder (26), a first evaporator (48) for vaporizing a hydrophobic layer forming material is disposed. On the side opposite the other side, a second evaporator (50) is arranged (Fig. 2).
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