Method for analysis of an integrated circuit, METHOD observation and their associated facilities.
2006
The invention relates to a method for analyzing an integrated circuit comprising: - a step (102) for applying laser radiation at a point on the surface of the circuit; - a step (106) energizing the circuit and subjected to laser radiation by applying an electric excitation signal; - a step (106) of collection of the response of the circuit to the excitation subjected to laser radiation, - a step (106) for measuring the difference phase between the response to the excitation of the circuit subjected to laser radiation and a reference circuit response in the absence of laser radiation applied to circuit.L'invention also relates to a method and associated observing installation.
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