A Triple Beam In-Situ Facility at Xiamen University

The ion implantation is a powerful scientific and technological tool in material research. Multiple ion beam facilities have been used to simulate the irradiation effects of neutrons on relevant nuclear materials over 30 years. By the use of transmission electron microscope (TEM) link facility, the microstructure evolvement in material can be in-situ studied during the irradiation and following annealing processes. In this paper, a triple beam in-situ facility, composed of a 400kV heavy ion implanter, a 50kV hydrogen­helium coaxial ion implanter and a 300kV electron microscope, will be presented. This facility will also be the first in-situ facility with the capacity of delivering the triple ion beam including hydrogen, helium and heavy ion beam to the specimen in TEM simultaneously. The angle between the two beam lines and microscope axis is 30°, respectively. [doi:10.2320/matertrans.MD201301]