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Measurement of residual stress of TiN thin film deposited by PVD method
Measurement of residual stress of TiN thin film deposited by PVD method
2002
Akira Azushima
Koshiro Aoki
Takayuki Amemiya
Keywords:
Thin film
Physical vapor deposition
Tin
Composite material
Residual stress
Materials science
Correction
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