Electron microscopy studies of CNT layers

SEM and TEM use in an investigation of CNT-Ni layers different properties is shown. We present the possibilities of using different SEM modes (SE - secondary electrons, LABE - low angle backscattered electrons) for studies of C-Ni and CNT-Ni layers topography, morphology and cross-sectional investigations (adhesion, pores size and shape, uniformity). Correlation between concentration of Ni in studied layers and technological parameters as well as in a case of CNT-Ni films correlations of Ni concentration and a diameter of carbon nanotubes are discussed. TEM studies concentrate on structure of Ni nanograins in C-Ni layers and CNT-Ni layers, CNT structure and defects, nanoonion structure. We present methods of determination of graphite plane number in MWCNTs, distance between these planes, role of catalyst position in CNT growth and interaction between catalyst and substrate. EDS method for qualitative analysis of Ni catalyst in these layers was also presented.