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Observation of the Unique Surface Morphology of Heavily Phosphorus Doped Silicon by Atomic Force Microscope
Observation of the Unique Surface Morphology of Heavily Phosphorus Doped Silicon by Atomic Force Microscope
2006
Wenbiao Ying
Yuichi Sano
Haruyoshi Iguchi
Keiko Watanabe
Yoshitomo Kamiura
Yusuke Mizokawa
Keywords:
Chemical structure
Morphology (linguistics)
Doping
Analytical chemistry
Atomic force microscopy
X-ray photoelectron spectroscopy
Phosphorus
Secondary Ion Mass Spectroscopy
Chemistry
Silicon
phosphorus doped
Correction
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