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Etching damage analysis of patterned media using the Grazing Incidence X-ray Reflectively technique
Etching damage analysis of patterned media using the Grazing Incidence X-ray Reflectively technique
2009
Shirotori Satoshi
Kamata Yoshiyuki
Maeda Tomoyuki
Kashiwagi Kazuto
Isowaki Yosuke
Kikitsu Akira
Keywords:
Etching
Patterned media
X-ray
Grazing
Materials science
Optoelectronics
damage analysis
Correction
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