Stability Of Multilayers At High Temperatures

The temperature stability of metal (W, WRe, Co, Cr)-carbon multilayers has been studied using X-ray diffraction (θ-2θ and Debye-Scherrer) and electron microscopy. The results show that in all cases a crystallization occurs in the temperature range 650-750°C. As a consequence of this crystallization, the layered structure is destroyed, the surface of the film becomes rough and the X-ray reflectivity is considerably reduced. These results imply that efficient cooling or new multilayer structures will have to be developed for use at high temperatures or under high X-ray incident flux.