Rapid thermal annealing effects on the structural and optical properties of Na–N codoped ZnO films

Abstract Polycrystalline ZnO thin films codoped with Na and N were obtained by chemical bath deposition. The structural characteristic and the optical properties of the rapid thermal annealed ZnO:(Na,N) films were investigated by X-ray diffraction, scanning electron microscopy, energy dispersive spectrometer (EDS), Raman spectrum and room-temperature photoluminescence. After RTA treatment, the XRD spectra showed a continuous decrease of the full- width at half-maximum (FWHM) of the (0 0 2) diffraction peak of the ZnO:(Na,N) film. The Raman spectra revealed that the intensity of the mode around 582 cm −1 increased with the increase of the RTA temperature. The PL spectra showed different trends in the UV luminescence of ZnO:(Na,N) films after RTA treatments.