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Low Temperature Dopant Activation for Integrated Electronics Applications
Low Temperature Dopant Activation for Integrated Electronics Applications
2006
Woodard
Manley
Fenger
Saxer
Hirschman
Dawson-Elli
Couillard
Keywords:
integrated electronics
Thin-film transistor
Ion implantation
Annealing (metallurgy)
Doping
Optoelectronics
Silicon on insulator
Dopant Activation
Rapid thermal processing
Materials science
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