Grazing emission X-ray fluorescence analysis for characteristics of film

Grazing emission X-ray fluorescence analysis is one of the important tools for the characterization of film in lab. In this paper, the principle and method are presented briefly for grazing emission X-ray fluorescence to analyze the thickness of the film. A set of equipment for film testing was set up in our laboratory, and its construction is described. The prototype setup is composed of a X-ray tube, a spectromenter and a gas-flow proportional counter with thin-film windows. The X-ray fluorescence produced by low Z element can be detected with this prototype setup. Meanwhile, the exit-angle dependence of the fluorescent X-ray intensity of some thin films with different thickness on Si substrates was demonstrated in theory, and the calculation results prove that the grazing emission X-ray fluorescence analysis is a good way to study the characteristics of film, such as the thickness of film.