Development of high-frequency bulk acoustic wave (BAW) resonators as biosensors and bioactuators

Using of bulk acoustic wave resonators for biosensing applications grows rapidly in recent years. In this review, we summarized the recent trend developing of these devices for biodetection from two aspects: 1) as biosensors to provide label-free measurement of biomarkers. 2) as bioacutuators to manipulate biomolecules and enhance biosensing performance.