Single table surface series plane PN junction chip and manufacturing method thereof

2009 
The invention discloses a single table surface series plane PN junction chip and a manufacturing method thereof. The PN junction chip comprises a silicon substrate and series plane PN junctions, wherein the series plane PN junctions are directly or indirectly manufactured on the silicon substrate, a single table surface is arranged on the edges of the two PN junctions, and glass or CVD deposited films or other passivating materials are also covered on the side walls of the table surface. The manufacturing method comprises the following steps of: forming the series plane PN junctions on the silicon substrate; forming the single table surface, so that the series plane PN junctions are exposed on the side walls of the single table surface; respectively forming a passivating layer on the side walls of the single table surface, so that the PN junctions are isolated from the outside; and finishing surface metalation.
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