Design and Simulation of Microcantilevers for Sensing Applications

MEMS is the integration of active and passive elements on a single chip, which combine electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology used in sensing applications with use of basic mechanical elements such as microcantilevers, beams, diaphragms, springs, gears and so on. In this research paper, microcantilevers are used as basic elements for design of Sensors. This paper shows the design and simulation of microcantilevers with static loads and respective variation in different parameters.