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Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision
Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision
2020
Eberhard Manske
Thomas Fröhlich
Roland Füßl
Ingo Ortlepp
Rostyslav Mastylo
Ulrike Blumröder
Denys Dontsov
Michael Kuhnel
Paul Köchert
Keywords:
Physics
Nanometre
Optics
Scale measurement
cross scale
Frequency comb
Nanometrology
Correction
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