Distribution en énergie des ions dans une décharge RF (13?56 MHz) argon-propane couplée capacitivement

The ion current and ion energy distribution impinging on a grounded surface immersed in capacitively coupled Ar and Ar-C 3 H 8 plasma have been measured as a function of pressure and self-bias voltage (V DC ).These results allowed to calculate the ionic density at the «anode» sheat boundary and reveals the importance of the role of argon in the propane-argon discharge