Low temp polycrystal silicone film transistor display panel and manufacturing method thereof
2005
A display panel comprising a substrate; a polysilicon layer, formed on the substrate, and a polycrystalline silicon layer crystallized using a solid phase crystallization method from; a silicon oxynitride (SiON) layer formed on the polysilicon layer, and a silicon oxynitride refractive index layer is from about 1.46 to 1.9; and a gate electrode (gate electrode), is formed on the silicon oxynitride layer.
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