Theoretical and experimental study of soft X-ray diffraction by a lamellar multilayer amplitude grating

The authors give a theoretical and experimental study of soft X-ray diffraction by a lamellar multilayer amplitude grating. Absolute efficiency measurements are obtained at 277 eV with a 1000 lines/mm grating etched in a Mo/C multilayer structure and comments based on numerical simulations performed in the framework of a dynamical theory of diffraction are presented. Effects which are not accounted for by a kinematical approach are made both experimentally and theoretically obvious.