Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

Micro-electromechanical systems (MEMS) piezoelectric harvester provides alternative power sources. Energy harvesting is utilized in power generator with characteristics length of less then 1 mm and more then 1 micron. The cantilever geometries have been made using Structure mechanics module for generated power. The piezoelectric material (PZT-5H) with thickness of 0.5 μm and silicon as base material with thickness 1.5 μm is added to cantilever using piezoelectric devices module. Among various shapes like (E,pi,T) though which E shaped cantilever shows the greatest deflection of 0.6078 μm and the power as 49.05 μW, whereas the T and pi shaped cantilever gives less piezoelectric voltage.