Volatile metal alkoxide of bifunctional beta-ether alcohols, its preparation and its use

PURPOSE: To obtain a new volatile metal alkoxide of bifunctional β-ether alcohols useful as a precursor for chemical vapor deposition from a gas phase of metal oxide. CONSTITUTION: This is a volatile complex compound of formula I (R 1 and R 2 are each methyl or 1-9C completely fluorinated alkyl; M is metal or semimetal of group I, II or IV to XV in periodic table, or uranium or thorium; (n) is 1 to 4), e.g. tris[1-methoxy-2-methyl-2-propanolate]chromium (III). The volatile complex compound of formula I is obtained by reacting β-ether alcohols of formula II with a homoleptic metal amide of formula III (R 3 is 1-4C alkyl) in an aprotic organic solvent. The compound of formula I is used as a molecular precursor for a gas-phase chemical vapor deposition of metal or metal oxide, e.g. a coating by very pure metal, particularly a molecular precursor for the catalytic metallized coating or the coating by oxide ceramics. COPYRIGHT: (C)1994,JPO