Investigation of surface-wave sustained discharge in neon byoptical emission spectroscopy and collisional-radiativemodelling
2013
The aim of this work is to extend a previously developed method
of determination of an electron temperature from optical
emission spectra to surface-wave sustained microwave
discharges. A surface-wave sustained discharge in coaxial tube
structure in neon at low pressure (300–700 Pa) was studied by
an optical emission spectroscopy. The spectra of the discharge
were analyzed first with self-absorption methods in order to
determine the densities of neon metastable states 1s3 and 1s5.
The optical spectra measured in absorption-free direction were
then analyzed with a 0D collisional-radiative model for neon
discharge in order to determine the electron temperature and
the reduced electric field strength in the discharge. Two types
of the electron distribution function were used in the
calculations – the Maxwellian EDF and the solution of the
Boltzmann kinetic equation. The neon metastable densities
determined from the self-absorption method depended on the gas
pressure ranging 0.10–0.46 x 1016 m-3 and 3.2–4.2 x 1016 m-3
for 1s3 and 1s5 state, respectively. The reduced electric field
strength decreased with the pressure from 10.5 to 4.5 Td,
influencing only little the mean electron energy of about 3.5
eV. At such electric field strengths, the electron distribution
functions determined using the Boltzmann solver were apparently
non-Maxwellian due to the inelastic electron collisions with
the neutral gas. Assuming Maxwellian EDF, the electron
temperature was decreasing in the range of 1.6–1.4 eV with the
pressure. The axial profiles of the reduced electric field
strength and the Maxwellian temperature were found practically
constant.
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