Refractory equipment for firing aluminum nitride substrates

This article describes the process of firing aluminum nitride substrates, which is a process that occurs under its characteristic conditions: high temperatures of over 1800°C and a reducing environment. This article also presents the fact that high quality substrates having desirable properties such as high thermal conductivity and parallelism between layers can be achieved. This article also describes how optimal firing modes can be established using a special sagger design based on boron nitride. The designed sagger is a container that consists of a body, which is a rectangular box; a bottom; and plane–parallel separating plates with supports. To create a local (inside the sagger) clean recovery medium, mortise and tenon joints that interlock are provided between the body and bottom and the interlocks are filled with a heat-resistant inert powder.