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Characterization of Stress Transfer from Process Induced Stressor Layer to Substrate in MOSFETs
Characterization of Stress Transfer from Process Induced Stressor Layer to Substrate in MOSFETs
2013
Rémi Thomas
D. Benoit
A. Pofelski
L. Clement
Pierre Morin
D. Cooper
F. Bertin
Keywords:
Substrate (chemistry)
Stressor
Photochemistry
Materials science
Biophysics
Correction
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