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GROWTH OF HIGHLY ORIENTED ZRTIO(4) THIN-FILMS BY RADIOFREQUENCY MAGNETRON SPUTTERING
GROWTH OF HIGHLY ORIENTED ZRTIO(4) THIN-FILMS BY RADIOFREQUENCY MAGNETRON SPUTTERING
1994
Da-chang
P Lin
Ty Tseng
Keywords:
Thin film
Analytical chemistry
Sputter deposition
Physics
Optoelectronics
radio frequency magnetron sputtering
Optics
Correction
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