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Heat treatment effect of high-k HfO2 for tunnel barrier memory application
Heat treatment effect of high-k HfO2 for tunnel barrier memory application
2010
Yeong-Hyeon Hwang
Hui-Uk Yu
Min Su Kim
Yeong Hui Lee
Won-Ju Jo
Keywords:
Materials science
treatment effect
High-κ dielectric
tunnel barrier
Composite material
Correction
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