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IIb-2 GaAs integrated lasers and detectors fabricated by wet chemical etching
IIb-2 GaAs integrated lasers and detectors fabricated by wet chemical etching
1977
J. L. Merz
R. A. Logan
Keywords:
Dry etching
Detector
Isotropic etching
Laser
Reactive-ion etching
Analytical chemistry
Physics
Optoelectronics
Correction
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