Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering
2017
Results of experiments on deposition of thin molybdenum films on glass substrates by high-power impulse magnetron sputtering are presented. Two high-current modes with different pulse frequencies and durations are used. Properties of the produced molybdenum films are compared with those of films produced by magnetron sputtering at a direct current. It is shown that this method allows the resistivity of molybdenum films to be decreased and their reflectance in the visible range to be increased.
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