XRDT Study of Structural Defects of 6H-SiC Crystals

X-Ray Diffraction Topography (XRDT) and Optical Microscopy (OM) are adopted to study extended structural defects in 6H-SiC bulky crystals. Topographs are taken by means of White Beam Synchrotron Radiation Source (WB-SRS-XRDT) and by means of monochromatic radiation (MoKα1) with conventional source (Lang method). All studied samples are characterised by the presence of linear defects, dislocations and microchannels, uniformly distributed in the crystal. Such defects draw a net of independent systems of parallel lines, with different orientation and different contrast widths. Micro-channels are parallel to the c axis, whereas dislocations are perpendicular or nearly parallel to the c axis. The last are unit screw dislocations. It has been concluded that the growth mechanism is driven by screw dislocations and that channels results from the coalescence of parallel dislocations.