Study on Piezoelectric Micropump Driven by PZT Bimorph

A piezoelectric micropump based on MEMS technology is presented.Polydimethylsiloxane(PDMS) is utilized to form the diaphragm,two passive check valves are formed by anisotropic etching of bulk silicon,and a piezoelectric bimorph is used as the actuator.The displacement of the PZT bimorph and the chamber volume change are analyzed,and the flow rate is measured.When a 100 V,20 Hz square wave signal is applied,the piezoelectric micropump reaches its maximum flow rate,317 μL/min.The result shows that the piezoelectric micropump is easy to fabricate and has a good performance to propel liquids.