Metrology qualification of EUV resists
2010
The ASML extreme ultraviolet lithography (EUV) alpha demo tool is a 0.25NA fully functional lithography
tool with a field size of 26×33 mm 2 , enabling process development for sub-40-nm technology. Two exposure
tools are installed in two research centers.
The main topic of this paper is the examination of the measured pattern roughness LER contributed by
measurement (SEM), exposure (EUV exposure tool) and the resists itself. The authors also examined
suspected metrology SEM challenges on different EUV resist types exposed by one of the EUV demo tools.
Standard CD SEM tests, such as precision and shrinkage were performed in order to get best working
conditions. As part of the research, special attention was given to expected electron - material interactions,
such as resist's slimming, low contrast and contamination build up on both lines. LER was analyzed in order
to determine separately the contribution effect of the exposure tool and the different resists. Additional
comparison was performed on different CDs with different orientations and densities.
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