Old Web
English
Sign In
Acemap
>
Paper
>
Nano-Imprint Lithography: From the Lab to the Factory
Nano-Imprint Lithography: From the Lab to the Factory
2005
Norman E. Schumaker
Keywords:
Optoelectronics
Nanoimprint lithography
Lithography
Nano-
Next-generation lithography
Physics
Multiple patterning
Computational lithography
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]