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Fabrication of α-Ga2O3 thin film with smooth surface by Mist CVD
Fabrication of α-Ga2O3 thin film with smooth surface by Mist CVD
2019
Tatsuya Yasuoka
Tamako Ozaki
Yuki Tagashira
Li Liu
Giang T. Dang
Toshiyuki Kawaharamura
Keywords:
Gallium oxide
Fabrication
Optoelectronics
Thin film
Mist
Materials science
Composite material
smooth surface
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