NEMS integrated photonic system using nano-silicon-photonic circuits

This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior performance. The proposed NEMS integrated photonic system demonstrates large tuning range (45 nm), pure single-mode properties (45 dB side-mode-suppression ratio (SMSR)).